|
|
Preparation and Properties of Heterocyclic Zinc-based Photoresist |
WU Rong1,3, ZHAO Weizhen2*, WANG Gongying3 |
1. Chengdu Institute of Organic Chemistry, Chinese Academy of Sciences, Chengdu 610041, China; 2. Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China; 3 University of Chinese Academy of Sciences, Beijing 100049, China |
|
|